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Caractéristiques d'un capteur de pression au silicium en milieu d'hélium superfluide pressurisé jusqu'à 1,5 MPa.

Characteristics of a silicon pressure sensor in superfluid helium pressurized up to 1.5 MPa.

Auteurs : MAEDA M., SATO A., YUYAMA M., et al.

Type d'article : Article

Résumé

It is known that a piezo-resistive pressure sensor, FPS-51B manufactured by Fujikura Ltd., is available for in situ pressure measurement in superfluid helium. The sensor covers a pressure range of zero to 103.4 kPa. The maximum rated pressure is 202.6 kPa at room temperature. The characteristics of the pressure sensor in a pressure range up to approximately 0.2 MPa are reported in detail for use in superfluid helium. The authors measured the pressure characteristics of this sensor up to 1.5 MPa to determine its availability to be used under much higher pressure.

Détails

  • Titre original : Characteristics of a silicon pressure sensor in superfluid helium pressurized up to 1.5 MPa.
  • Identifiant de la fiche : 2005-1096
  • Langues : Anglais
  • Source : Cryogenics - vol. 44 - n. 4
  • Date d'édition : 04/2004

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