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Application d'une conception d'écoulement d'air par dynamique numérique des fluides (CFD) à une salle blanche.

Application of CFD airflow design for clean rooms.

Auteurs : QI W., HUANG W. H.

Résumé

Clean rooms recently became an indispensable environment in the pharmaceutical, medical technology, and semiconductor industries for producing high quality and precision products. The paper illustrates how to use the CFD method as an assistant tool to design an ISO5 class clean room. The authors use the CFD method to study the airflow and cross-contamination in a photo resists research lab. The Reynolds-averaged Navier-Stokes equations governing the flow are solved using a finite-volume code FLUENT. The standard k-epsilon-turbulence model has been used. They study the at-rest and operational states of the clean room. From the numerical results, they found that when the exhaust fan was opened, the vertical unidirectional airflow would be destroyed and many vortexes would appear in the clean room. The results showed that the clean room would not be accord with the design request in the operational state.

Détails

  • Titre original : Application of CFD airflow design for clean rooms.
  • Identifiant de la fiche : 2007-0820
  • Langues : Anglais
  • Source : ACRA-2006. Proceedings of the 3rd Asian conference on refrigeration and air conditioning.
  • Date d'édition : 21/05/2006

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