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Développement d’un réfrigérateur Joule-Thomson à frigorigènes mixtes non inflammables pour le processus de gravure des semi-conducteurs.

Development of non-flammable mixed refrigerant Joule-Thomson refrigerator for semiconductor etching process.

Numéro : 0870

Auteurs : LEE C., LEE J. G., KIM J. M., CHA D. A., KIM S. C., YOO W. J., KIM H. J., KIM S. S., HONG J. G.

Résumé

A mixed refrigerant(MR) Joule-Thomson(J-T) refrigerator was designed to be applied to the semiconductor etching process. The designed mixed refrigerant Joule Thompson refrigerator is 2-stage cascade type MR J-T refrigeration cycle. R1234yf vapor compression cycle is adpated pre-cooling, which is low global warming potential refrigeratnt, and mixture of argon(Ar), tetrafluoromethane(CF4, R14), trifluoromethane (CHF3, R23) and Octafluoropropane(C3F8, R218) is applied to the main cooling cycle. The target temperature of the designed MR J-T refrigerator is approximately -100℃. An indirect cooling method using coolant (HFE77200) was introduced in order to apply to the semiconductor etching process. Coefficient of performance(COP), cooling capacity and the lowest temperature of of the developed MR J-T refrigerator was optained as 0.19, 1.1 kW and -100 ℃, respectively. The detailed design and experimental results are discussed in this study.

Documents disponibles

Format PDF

Pages : 6 p.

Disponible

  • Prix public

    20 €

  • Prix membre*

    Gratuit

* meilleur tarif applicable selon le type d'adhésion (voir le détail des avantages des adhésions individuelles et collectives)

Détails

  • Titre original : Development of non-flammable mixed refrigerant Joule-Thomson refrigerator for semiconductor etching process.
  • Identifiant de la fiche : 30031518
  • Langues : Anglais
  • Sujet : Technologie
  • Source : Proceedings of the 26th IIR International Congress of Refrigeration: Paris , France, August 21-25, 2023.
  • Date d'édition : 21/08/2023
  • DOI : http://dx.doi.org/10.18462/iir.icr.2023.0870

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