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Development of non-flammable mixed refrigerant Joule-Thomson refrigerator for semiconductor etching process.

Number: 0870

Author(s) : LEE C., LEE J. G., KIM J. M., CHA D. A., KIM S. C., YOO W. J., KIM H. J., KIM S. S., HONG J. G.

Summary

A mixed refrigerant(MR) Joule-Thomson(J-T) refrigerator was designed to be applied to the semiconductor etching process. The designed mixed refrigerant Joule Thompson refrigerator is 2-stage cascade type MR J-T refrigeration cycle. R1234yf vapor compression cycle is adpated pre-cooling, which is low global warming potential refrigeratnt, and mixture of argon(Ar), tetrafluoromethane(CF4, R14), trifluoromethane (CHF3, R23) and Octafluoropropane(C3F8, R218) is applied to the main cooling cycle. The target temperature of the designed MR J-T refrigerator is approximately -100℃. An indirect cooling method using coolant (HFE77200) was introduced in order to apply to the semiconductor etching process. Coefficient of performance(COP), cooling capacity and the lowest temperature of of the developed MR J-T refrigerator was optained as 0.19, 1.1 kW and -100 ℃, respectively. The detailed design and experimental results are discussed in this study.

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Details

  • Original title: Development of non-flammable mixed refrigerant Joule-Thomson refrigerator for semiconductor etching process.
  • Record ID : 30031518
  • Languages: English
  • Subject: Technology
  • Source: Proceedings of the 26th IIR International Congress of Refrigeration: Paris , France, August 21-25, 2023.
  • Publication date: 2023/08/21
  • DOI: http://dx.doi.org/10.18462/iir.icr.2023.0870

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