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Effets de la température de conditionnement d'air et de l'exposition à de fortes concentrations de toluène sur le taux de production de composés organiques sur les surfaces d'une salle blanche.

[In Japanese. / En japonais.]

Auteurs : HONDA S., SHIMADA M., OKUYAMA K.

Type d'article : Article

Résumé

For prevention of airborne molecular contamination in semiconductor manufacturing factories, the effects of air conditioning temperature and exposure to high-concentration toluene from cleanroom surfaces were studied. The organic compound concentration in cleanroom air increases after changing the air conditioning temperature from 23 to 33 °C, and decreases when the temperature is brought back to 23 °C. This decrease is considered to be caused by adsorption of low-boiling-point compounds on the surfaces. Toluene is adsorbed on the surfaces by exposure to a high concentration of toluene, and the rate of generation of toluene is found to correlate with the ventilation time using outdoor air and with the quantity of toluene involved in exposure.

Détails

  • Titre original : [In Japanese. / En japonais.]
  • Identifiant de la fiche : 2004-0873
  • Langues : Japonais
  • Source : Transaction of the Society of Heating, Air-conditioning and Sanitary Engineers of Japan - n. 89
  • Date d'édition : 04/2003
  • Document disponible en consultation à la bibliothèque du siège de l'IIF uniquement.

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