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Effects of air conditioning temperature and high-concentration toluene exposure on the rate of generation of organic compounds from cleanroom surfaces.

[In Japanese. / En japonais.]

Author(s) : HONDA S., SHIMADA M., OKUYAMA K.

Type of article: Article

Summary

For prevention of airborne molecular contamination in semiconductor manufacturing factories, the effects of air conditioning temperature and exposure to high-concentration toluene from cleanroom surfaces were studied. The organic compound concentration in cleanroom air increases after changing the air conditioning temperature from 23 to 33 °C, and decreases when the temperature is brought back to 23 °C. This decrease is considered to be caused by adsorption of low-boiling-point compounds on the surfaces. Toluene is adsorbed on the surfaces by exposure to a high concentration of toluene, and the rate of generation of toluene is found to correlate with the ventilation time using outdoor air and with the quantity of toluene involved in exposure.

Details

  • Original title: [In Japanese. / En japonais.]
  • Record ID : 2004-0873
  • Languages: Japanese
  • Source: Transaction of the Society of Heating, Air-conditioning and Sanitary Engineers of Japan - n. 89
  • Publication date: 2003/04
  • Document available for consultation in the library of the IIR headquarters only.

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