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Séparation de mélanges binaires à base d'hélium et de gaz inertes lourds.

Separation of binary mixtures based on helium and heavy inert gases.

Numéro : 134

Résumé

The ion-plasma etching technologies use gas mixtures based on helium and one of the heavy inerts (Xe, Kr and Ar). The recycling of valuable components is of great importance in the context of the increasing cost of rare gases. There are several methods for separation of mixtures for the purpose of recycling of individual components. These include periodic adsorption and desublimation (freezing) processes as well as continuous flow separation in rectification columns or membrane modules. A combination of several processes is required to produce pure gases from a complex mixture. When designing the process sequence, the properties of the individual components and the cryogenic supply specifics must be taken into account. In many cases, the choice of a particular process mode is a matter of a compromise between the purity of the produced products and the degree of their loss in the mixture refining process.

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Pages : 5 p.

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Détails

  • Titre original : Separation of binary mixtures based on helium and heavy inert gases.
  • Identifiant de la fiche : 30031057
  • Source : Cryogenics 2023. Proceedings of the 17th IIR International Conference, Dresden, Germany, april 25-28 2023
  • Date d'édition : 25/04/2023
  • DOI : http://dx.doi.org/10.18462/iir.cryo.2023.0134

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