Partager

Méthodes d'évaluation pour déterminer la performance des filtres pour contaminants moléculaires véhiculés par l'air dans une salle blanche.

Testing methods for determining the performance of AMC filters in clean rooms.

Auteurs : KANG Y., HUANG C. Y., PERNG J. C., et al.

Résumé

Chemical filtration has become a technique effective in controlling airborne molecular contaminants (AMCs) in the clean-room environment. The performance of chemical filters always influences clean-room quality and yield enhancement. However, there are no unified standardized testing methods for evaluating chemical filters in clean rooms so far. The study describes a standardized testing facility for clean-room chemical filters, which was recently built in TRI/Taiwan for the purpose of serving local semiconductor industries as well as filter makers around the world. Taking several international standards such as JIS B9901, ISO/TS-11155-2 and NT VVS 109 as a reference, the facility was designed to test full-scale filters and incorporate multiple tests in one single facility. The results indicated a satisfactory facility design, which could be a valuable reference for future testing facilities and testing standards of AMCs chemical filters.

Détails

  • Titre original : Testing methods for determining the performance of AMC filters in clean rooms.
  • Identifiant de la fiche : 2007-0819
  • Langues : Anglais
  • Source : ACRA-2006. Proceedings of the 3rd Asian conference on refrigeration and air conditioning.
  • Date d'édition : 21/05/2006

Liens


Voir d'autres communications du même compte rendu (161)
Voir le compte rendu de la conférence

Indexation