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Testing methods for determining the performance of AMC filters in clean rooms.

Author(s) : KANG Y., HUANG C. Y., PERNG J. C., et al.

Summary

Chemical filtration has become a technique effective in controlling airborne molecular contaminants (AMCs) in the clean-room environment. The performance of chemical filters always influences clean-room quality and yield enhancement. However, there are no unified standardized testing methods for evaluating chemical filters in clean rooms so far. The study describes a standardized testing facility for clean-room chemical filters, which was recently built in TRI/Taiwan for the purpose of serving local semiconductor industries as well as filter makers around the world. Taking several international standards such as JIS B9901, ISO/TS-11155-2 and NT VVS 109 as a reference, the facility was designed to test full-scale filters and incorporate multiple tests in one single facility. The results indicated a satisfactory facility design, which could be a valuable reference for future testing facilities and testing standards of AMCs chemical filters.

Details

  • Original title: Testing methods for determining the performance of AMC filters in clean rooms.
  • Record ID : 2007-0819
  • Languages: English
  • Source: ACRA-2006. Proceedings of the 3rd Asian conference on refrigeration and air conditioning.
  • Publication date: 2006/05/21

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