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Etude expérimentale sur les batteries de microcaloducs en silicium.

Experimental study on silicon micro-heat pipe arrays.

Auteurs : LAUNAY S., SARTRE V., LALLEMAND M.

Type d'article : Article

Résumé

In the study, micro-heat pipe arrays etched into silicon wafers have been investigated for electronic cooling purposes. Micro-heat pipes of triangular cross-section and with liquid arteries were fabricated by wet anisotropic etching with a KOH solution. The microchannels (230 µm wide) are closed by molecular bonding of a plain wafer with the grooved one. A test bench was developed for the micro-heat pipe filling and the thermal characterisation. The temperature profile on the silicon surface is deduced from experimental measurements. The results show that with the artery micro-heat pipe array, filled with methanol, the effective thermal conductivity of the silicon wafer is significantly improved compared to massive silicon.

Détails

  • Titre original : Experimental study on silicon micro-heat pipe arrays.
  • Identifiant de la fiche : 2004-2172
  • Langues : Anglais
  • Source : Applied Thermal Engineering - vol. 24 - n. 2-3
  • Date d'édition : 02/2004

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