Share

Generation techniques of extremely high vacuum.

[In Japanese. / En japonais.]

Author(s) : MATSUI Y., YAMAKAWA H.

Type of article: Article

Summary

More than 30 years passed since the ultra-high vacuum technique was developed. The vacuum pumps used for the generation of extremely high vacuum are liquid-nitrogen cooled sublimation pumps, liquid-helium and liquid-nitrogen cooled cryopumps, and helium-refrigerator cooled cryopumps. They are closely related with cryogenic engineering. The authors summarize recent successful works for the generation of extremely high vacuum.

Details

  • Original title: [In Japanese. / En japonais.]
  • Record ID : 1993-0647
  • Languages: Japanese
  • Source: Cryogenics/ Cryog. Eng. - vol. 26 - n. 5
  • Publication date: 1991
  • Document available for consultation in the library of the IIR headquarters only.

Links


See other articles in this issue (9)
See the source

Indexing