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AIR MOVEMENT STUDIES.

Author(s) : WATERS R.

Summary

DESCRIBES THE USE OF A FLOW MODELLING TECHNIQUE TO PREDICT THE AIR MOVEMENT PATTERNS IN COMMONLY USED CLEAN RO PREDICTED RESULTS CORRESPOND QUALITATIVELY TO OBSERVED DATA. DETAILS A METHOD OF ASSESSING THE PROBABILITY OF A CRITICAL SIZE PARTICLE DAMAGING THE DEVICE BEING MANUFACTURED. PRESENTS A STRATEGY FOR USING THESE TECHNIQUES TO REDUCE PRODUCT DAMAGE. (INT. BUILD. SERV. ABSTR., GB., 22, N 2, 1987, 24, 87-00593.

Details

  • Original title: AIR MOVEMENT STUDIES.
  • Record ID : 1987-2361
  • Languages: English
  • Publication date: 1986/01/29
  • Source: Source: Inst. mech. Eng., Semin. clean Room Des., London
    7-12; 11 fig.
  • Document available for consultation in the library of the IIR headquarters only.

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