Clean rooms.
Author(s) : SEIPP H. M., BARTH U.
Type of article: Article
Summary
The paper discusses test methods for clean rooms. Low reliability of these methods leads to a discrepancy between guarantee conditions and those in daily operation. Tests should be carried out in accordance with the standard DIN 4799. Time for particle elimination and disturbance factors due to the tests should be included.
Details
- Original title: Clean rooms.
- Record ID : 1994-1952
- Languages: English
- Subject: Regulation
- Source: Heiz. Lüft.-Klima Haustech. - vol. 44 - n. 3
- Publication date: 1993/03
Links
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Indexing
-
Commissioning clean rooms.
- Author(s) : KAHLDEN T. von
- Date : 1992/09
- Languages : German
- Source: Heiz. Lüft.-Klima Haustech. - vol. 43 - n. 9
View record
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Reinraumtechnik: Bau, Betrieb und Instandhaltun...
- Author(s) : VDI
- Date : 1996/02
- Languages : German
View record
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International standardization in clean room eng...
- Author(s) : SCHICHT H. H.
- Date : 1995/03
- Languages : German
- Source: Heiz. Lüft. Haustech. - vol. 46 - n. 3
View record
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Acceptance measurements of clean rooms.
- Author(s) : KAHLDEN T. von
- Date : 1993/03
- Languages : German
- Source: Heiz. Lüft.-Klima Haustech. - vol. 44 - n. 3
View record
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Reinraumtechnik: Oberflächenreinheit./ Clean-ro...
- Author(s) : VDI
- Date : 1996/02
- Languages : German
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