ShareCryogenically cooled multiple-substrate holder for high vacuum.
Author(s) : CHAIKEN A., HONEA E. C., RUPPRECHT W. S., TORRES S., MICHEL R. P.
Type of article: Article
Summary
The cryogen flows through tubing soldered onto a fixed copper plate, wile the substrates are mounted on a separate tray that is supported by a linear-rotary-motion feedthrough. By lowering the substrate tray into firm contact with the copper plate, substrate temperatures as low as 120 K can be achieved.
Details
- Original title: Cryogenically cooled multiple-substrate holder for high vacuum.
- Record ID : 1995-3411
- Languages: English
- Source: Rev. sci. Instrum. - vol. 65 - n. 12
- Publication date: 1994/12
- Document available for consultation in the library of the IIR headquarters only.
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