Share

Cryogenically cooled multiple-substrate holder for high vacuum.

Author(s) : CHAIKEN A., HONEA E. C., RUPPRECHT W. S., TORRES S., MICHEL R. P.

Type of article: Article

Summary

The cryogen flows through tubing soldered onto a fixed copper plate, wile the substrates are mounted on a separate tray that is supported by a linear-rotary-motion feedthrough. By lowering the substrate tray into firm contact with the copper plate, substrate temperatures as low as 120 K can be achieved.

Details

  • Original title: Cryogenically cooled multiple-substrate holder for high vacuum.
  • Record ID : 1995-3411
  • Languages: English
  • Source: Rev. sci. Instrum. - vol. 65 - n. 12
  • Publication date: 1994/12
  • Document available for consultation in the library of the IIR headquarters only.

Links


See other articles in this issue (4)
See the source

Indexing