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Oxide superconductor thin films.

[In Japanese. / En japonais.]

Author(s) : KUSAKA T., KAKEHI Y., YOTSUYA T.

Type of article: Article

Summary

Several methods such as sputtering, vapour deposition, pulsed laser deposition and chemical vapour deposition have successfully been used to produce oxide superconductor films with epitaxial growth. Oxidation is a critical condition to obtain good quality films. In addition, peripheral technologies such as etching, electrode formation and protection coating are considered to be important for devices such as Josephson junctions, SQUIDs and infrared radiation detectors.

Details

  • Original title: [In Japanese. / En japonais.]
  • Record ID : 1995-3404
  • Languages: Japanese
  • Source: Cryogenics/ Cryog. Eng. - vol. 29 - n. 11
  • Publication date: 1994
  • Document available for consultation in the library of the IIR headquarters only.

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