PIEZODRIVEN SCANNER FOR CRYOGENIC APPLICATIONS.

Author(s) : LA COMB L. J. Jr, QUATE C. F.

Type of article: Article

Summary

A SCANNING MICROSCOPE STAGE HAS BEEN DEVELOPED FOR USE AT CRYOGENIC TEMPERATURE. THE STAGE USES A PIEZOELECTRIC DRIVING ELEMENT AND CIRCULAR FLEXURE HINGES TO ACHIEVE A SLOW SCAN TRAVEL OF GREATER THAN 10 MICROMETERS AND A NEAR-RESONANCE TRAVEL OF 100 MICROMETERS WHILE IMMERSED IN LIQUID HELIUM AT 4.2 K. THE SCANNER HAS BEEN OPERATED INSIDE A PRESSURE CELL IN A DILUTION REFRIGERATOR, WHERE IT DISSIPATES LESS THAN 150 MICROWATT OF HEAT AT 100 MILLIK.

Details

  • Original title: PIEZODRIVEN SCANNER FOR CRYOGENIC APPLICATIONS.
  • Record ID : 1989-0822
  • Languages: English
  • Source: Rev. sci. Instrum. - vol. 59 - n. 9
  • Publication date: 1988
  • Document available for consultation in the library of the IIR headquarters only.

Links


See the source