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Preparation of large-area high-quality YBCO thin films by pulsed laser deposition with silicon heater and composite scanning of laser and target.

Author(s) : LU H. B., XU S. F., TIAN Y. J., CUI D. F., CHEN Z. H., ZHANG Y. Z., LI L., YANG G. Z.

Type of article: Article

Summary

The silicon heater, composite scanning of laser beam and target, and experiment results are described. The temperature variation of the silicon heater was lower than more or less 0.5% in a 45 x 40 mm2 area of 900-1000 deg C. Films were deposited on lanthanum-aluminium oxide substrates 35 mm in diameter. The thin films exhibited a thickness variation of more or less 2.5%. The superconducting properties are also given.

Details

  • Original title: Preparation of large-area high-quality YBCO thin films by pulsed laser deposition with silicon heater and composite scanning of laser and target.
  • Record ID : 1995-0018
  • Languages: English
  • Source: J. Supercond. - vol. 6 - n. 5
  • Publication date: 1993/10
  • Document available for consultation in the library of the IIR headquarters only.

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