ShareSummary
THE ARTICLE DESCRIBES THE CONSTRUCTION AND PRINCIPLE OF A CRYOPUMP OPERATING IN A CLOSED CYCLE REFRIGERATING SYSTEM. EXAMPLES ARE GIVEN OF CRYOPUMPS DEVELOPED FOR ULTRA HIGH VACUUM, HIGH PUMPING SPEEDS AND FOR SPUTTERING PROCESSES.
Details
- Original title: [In Japanese. / En japonais.]
- Record ID : 1989-0828
- Languages: Japanese
- Source: Cryogenics/ Cryog. Eng. - vol. 23 - n. 4
- Publication date: 1988
- Document available for consultation in the library of the IIR headquarters only.
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Indexing
- Themes: Transport and handling of cryogenic fluids
- Keywords: Performance; Cryocooler; Cryopump; Cryogenics
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LES BASES PHYSIQUES DU CRYOPOMPAGE.
- Author(s) : RENARD M.
- Date : 1984/03
- Languages : French
- Source: Vide Couches minces - suppl. n. 221
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MESURES DE VIBRATIONS SUR CRYOPOMPES A CRYOGENE...
- Author(s) : BOBILLON J. P.
- Date : 1984/03
- Languages : French
- Source: Vide Couches minces - suppl. n. 221
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Research on cryosystem reservoir pump (CSPP).
- Author(s) : BRAYLOVSKIY Y., BLYUKHER B.
- Date : 2005/10
- Languages : English
- Source: Applied Thermal Engineering - vol. 25 - n. 14-15
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REFRIGERATOR COOLED CRYOPUMPS AND THEIR APPLICA...
- Author(s) : GOETZ D., SCHAEFER G.
- Date : 1984/03
- Languages : English
- Source: Vide Couches minces - suppl. n. 221
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SEALING FOR CRYOGENIC TURBOPUMPS.
- Author(s) : SUBRAMANIAN B., KANAKA RAJU B., GUPTA N. K.
- Date : 1985
- Languages : English
- Source: Indian J. Cryog. - vol. 10 - n. 4
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