Summary
THE ARTICLE DESCRIBES THE CONSTRUCTION AND PRINCIPLE OF A CRYOPUMP OPERATING IN A CLOSED CYCLE REFRIGERATING SYSTEM. EXAMPLES ARE GIVEN OF CRYOPUMPS DEVELOPED FOR ULTRA HIGH VACUUM, HIGH PUMPING SPEEDS AND FOR SPUTTERING PROCESSES.
Details
- Original title: [In Japanese. / En japonais.]
- Record ID : 1989-0828
- Languages: Japanese
- Source: Cryogenics/ Cryog. Eng. - vol. 23 - n. 4
- Publication date: 1988
- Document available for consultation in the library of the IIR headquarters only.
Links
See other articles in this issue (6)
See the source
Indexing
- Themes: Transport and handling of cryogenic fluids
- Keywords: Performance; Cryocooler; Cryopump; Cryogenics
-
CRYOPUMPING: ITS EVOLUTION AND FUTURE.
- Author(s) : BOISSIN J. C.
- Date : 1984/03
- Languages : English
- Source: Vide Couches minces - suppl. n. 221
View record
-
HIGH CAPACITY CRYOPUMP FOR A NEUTRAL BEAM TEST-...
- Author(s) : SLEDZIEWSKI Z.
- Date : 1984/03
- Languages : English
- Source: Vide Couches minces - suppl. n. 221
View record
-
CONSTRUCTION OF THE LARGE CRYOPUMP SYSTEMS FOR ...
- Author(s) : BOISSIN J. C.
- Date : 1984/03
- Languages : English
- Source: Vide Couches minces - suppl. n. 221
View record
-
TEST OF A CRYOGENIC HELIUM PUMP.
- Author(s) : LUE J. W.
- Date : 1981/08
- Languages : English
View record
-
POMPAGE DE L'HELIUM PAR POMPE A VIDE A ANNEAU L...
- Author(s) : MATHY C.
- Date : 1983/08/07
- Languages : French
- Source: [Refrigeration serving humanity]. Proceedings of the XVIth international Congress of Refrigeration.
- Formats : PDF
View record