SMALL CRYOPUMPS.

[In Japanese. / En japonais.]

Author(s) : YAMAKAWA H.

Type of article: Article

Summary

THE ARTICLE DESCRIBES THE CONSTRUCTION AND PRINCIPLE OF A CRYOPUMP OPERATING IN A CLOSED CYCLE REFRIGERATING SYSTEM. EXAMPLES ARE GIVEN OF CRYOPUMPS DEVELOPED FOR ULTRA HIGH VACUUM, HIGH PUMPING SPEEDS AND FOR SPUTTERING PROCESSES.

Details

  • Original title: [In Japanese. / En japonais.]
  • Record ID : 1989-0828
  • Languages: Japanese
  • Source: Cryogenics/ Cryog. Eng. - vol. 23 - n. 4
  • Publication date: 1988
  • Document available for consultation in the library of the IIR headquarters only.

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