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ULTRAHIGH VACUUM AND THE CRYOPUMP.

[In Japanese. / En japonais.]

Author(s) : TARUTANI I., YAGI N.

Type of article: Article

Summary

A PRESENTATION OF THE CHARACTERISTICS AND APPLICATIONS AND THE TECHNOLOGIES APPLIED TO ULTRAHIGH VACUUM (OR < CLEAN VACUUM >) AND THE CRYOPUMP. THE PROBLEMS WHICH HAVE TO BE OVERCOME IN CRYOPUMPING ARE CLEANLINESS, IMPROVING THE LOWEST OBTAINABLE PRESSURES AND SYSTEM OPERATION AND REDUCING VIBRATION.

Details

  • Original title: [In Japanese. / En japonais.]
  • Record ID : 1989-1670
  • Languages: Japanese
  • Source: Refrigeration - vol. 63 - n. 733
  • Publication date: 1988
  • Document available for consultation in the library of the IIR headquarters only.

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