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PRINCIPLE AND ACHIEVEMENT OF A DRY MECHANICAL PUMP REACHING 1.33 PASCAL. COUPLING WITH CRYOPUMPING.

PRINCIPE ET REALISATION D'UNE POMPE MECANIQUE SECHE DESCENDANT A 1,33 PASCAL. SON ASSOCIATION AU POMPAGE CRYOGENIQUE.

Author(s) : EVRARD R.

Type of article: Article

Summary

THE BASIC PRINCIPLE AND THE REALISATION OF A DRY MECHANICAL MEMBRANE PUMP WITH A PRESSURE LIMIT OF 1.33 PASCAL ARE DESCRIBED. WORKING CONDITIONS ARE ANALYSED IN DETAILS. ADVANTAGES EXPECTED OF THE COUPLING OF THIS PRIMARY PUMP WITH TURBOMOLECULAR, CRYOGENIC OR GETTER IONIC PUMPS ARE DISCUSSED.

Details

  • Original title: PRINCIPE ET REALISATION D'UNE POMPE MECANIQUE SECHE DESCENDANT A 1,33 PASCAL. SON ASSOCIATION AU POMPAGE CRYOGENIQUE.
  • Record ID : 1985-0421
  • Languages: French
  • Source: Vide Couches minces - suppl. n. 221
  • Publication date: 1984/03
  • Document available for consultation in the library of the IIR headquarters only.

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