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Visualization of mixed convective vortex rolls in an impinging jet flow of air through a cylindrical chamber.

Author(s) : CHENG T. C., CHIOU P. H., LIN T. F.

Type of article: Article

Summary

In this study a combined buoyancy and inertia driven vortex flow in an air jet impinging onto a heated circular plate confined in a cylindrical chamber simulating that in a vertical single-wafer rapid thermal processor for semiconductor manufacturing is investigated experimentally by flow visualization. A copper plate is used to simulate the wafer for its better uniformity of the surface temperature and air is used to replace the inert gases.

Details

  • Original title: Visualization of mixed convective vortex rolls in an impinging jet flow of air through a cylindrical chamber.
  • Record ID : 2003-1182
  • Languages: English
  • Source: International Journal of Heat and Mass Transfer - vol. 45 - n. 16
  • Publication date: 2002/07

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