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Development of non-flammable mixed refrigerant Joule-Thomson refrigerator for semiconductor etching process.

• Author(s) : LEE C., LEE J. G., KIM J. M., CHA D. A., KIM S. C., YOO W. J., KIM H. J., KIM S. S., HONG J. G.
• Publication date: 2023/08/21
• Languages : English
• Source: Proceedings of the 26^th IIR International Congress of Refrigeration: Paris , France, August 21-25, 2023.
• Formats : PDF