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GENERATING AN ULTRAHIGH VACUUM WITH BATH CRYOPUMPS.

[In German. / En allemand.]

Author(s) : DORR M., JACKEL M.

Type of article: Article

Summary

THIS ARTICLE CONCENTRATES ON THE EXAMINATION AND DISCUSSION OF PROBLEMSOF ULTRAHIGH VACUUM GENERATION BY THE APPLICATION OF LOW TEMPERATURES (CRYOPUMPS). INITIALLY, A COMPARISON IS MADE OF BATH AND REFRIGERATOR CRYOPUMPS. AFTER AN INTRODUCTION TO THE PHYSICAL PROCESSES IN CRYOVACUUM GENERATION (CONDENSATION, SORPTION), THE EXPERIMENTAL RESULTS ARE PRESENTED THAT WERE OBTAINED WITH A COMBINED CONDENSATION-ADSORPTION PUMP (REFRIGERANT HELIUM/NITROGEN). IT WAS POSSIBLE TO ACHIEVE A FINAL PRESSURE OF 0.01 MICROPASCAL AT A SUCTION CAPACITY (AIR)OF 1 M3/S. THE PLANT SERVICE TIME WAS ABOUT 1 WEEK.

Details

  • Original title: [In German. / En allemand.]
  • Record ID : 1991-0005
  • Languages: German
  • Publication date: 1990
  • Source: Source: Luft Kältetech.
    vol. 26; n. 2; 99-102; 3 fig.; 4 tabl.; 9 ref.
  • Document available for consultation in the library of the IIR headquarters only.

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