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MODULAR CLEAN ROOMS IN THE ELECTRONICS INDUSTRY.

Author(s) : LARSSON B., NEIKTER K., STRINDEHAG O.

Type of article: Article

Summary

CLEAN ROOMS, BUILT TO MODULAR DESIGN AND DIVIDED INTO ZONES, PROVIDE THE ENVIRONMENT NECESSARY FOR PRESENT-DAY MANUFACTURE OF LARGE-SCALE INTEGRATED CIRCUITS, WITH ITS INTENSIVE AUTOMATION AND BROAD USE OF ROBOTS. A NEW CLEAN ROOM CONCEPT, IN WHICH SPACE IS DIVIDED INTO PRODUCT ZONES AND AIR FLOW AROUND THE PROCESS EQUIPMENT AND PRODUCTS IS CAREFULLY CONTROLLED, HELPS TO IMPROVE PRODUCTION YIELD. OTHER BENEFITS ARE LOWER ORIGINAL INVESTMENT AND THE REDUCED COST OF RUNNING THE PLANT.

Details

  • Original title: MODULAR CLEAN ROOMS IN THE ELECTRONICS INDUSTRY.
  • Record ID : 1990-1620
  • Languages: English
  • Source: H&V Eng. - vol. 62 - n. 696
  • Publication date: 1989/08
  • Document available for consultation in the library of the IIR headquarters only.

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