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Airflow considerations in the design of production facilities in clean rooms.

Author(s) : DEGENHART E.

Type of article: Article

Summary

States that since airborne particles follow the airflow, it is essential to design the functional and structural components of a clean room with respect to the airflow and to integrate them into the overall system. States the aim is to achieve almost complete separation of the airflow zones that are influenced by the product from potential particle sources.

Details

  • Original title: Airflow considerations in the design of production facilities in clean rooms.
  • Record ID : 1993-3551
  • Languages: English
  • Publication date: 1992/09
  • Source: Source: Environ. Eng.
    vol. 5; n. 3; 11-16; 10 fig.; 10 ref.
  • Document available for consultation in the library of the IIR headquarters only.

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