NUMERICAL STUDY OF FLOW AND CONTAMINANT DIFFUSION FIELDS AS AFFECTED BY FLOW OBSTACLES IN CONVENTIONAL-FLOW-TYPE CLEAN ROOM.

Author(s) : MURAKAMI S., KATO S., SUYAMA Y.

Summary

AN APPARATUS PLACED IN A CLEAN ROOM HAS A GREAT INFLUENCE ON THE FLOW FIELD. SUCH FLOW OBSTACLES OFTEN GENERATE AIRBORNE PARTICLES INTO THE AIR FLOW. THUS, IT IS VERY IMPORTANT TO CLARIFY THE FLOW FIELD AND CONTAMINANT DIFFUSION FIELD AROUND FLOWOBSTACLES. IN THE PAPER, THE AIRFLOW DISTRIBUTION AND THE CONTAMINANT DIFFUSION FIELD IN A CONVENTIONAL-FLOW-TYPE CLEAN ROOM WITH FLOW OBSTACLES IN VARIOUS ARRANGEMENTS ARE ANALYZED. CORRESPONDENCE BETWEEN THE SIMULATIONS AND THE EXPERIMENTSIS FAIRLY GOOD, BOTH FOR THE VELOCITY FIELD AND FOR THE CONTAMINANT DIFFUSION FIELD.

Details

  • Original title: NUMERICAL STUDY OF FLOW AND CONTAMINANT DIFFUSION FIELDS AS AFFECTED BY FLOW OBSTACLES IN CONVENTIONAL-FLOW-TYPE CLEAN ROOM.
  • Record ID : 1992-0778
  • Languages: English
  • Publication date: 1990
  • Source: Source: ASHRAE Trans.
    vol. 96; n. 2; 343-355; 14 fig.; 4 tabl.; 7 ref.
  • Document available for consultation in the library of the IIR headquarters only.