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Refrigerator-cooled cryopump.

[In Japanese. / En japonais.]

Author(s) : HIRESAKI Y.

Type of article: Article

Summary

The principle of pumping mechanism and basic construction are described with some applications of two-staged Gifford-McMahon cycle or modified Solvay cycle refrigerator. The first stage cold station cools a baffle and a radiation shield which condenses water vapour and blocks thermal radiation to the cryopanel. The cryopanel cooled by the second stage cold station condenses most gases except neon, hydrogen and helium which are adsorbed by charcoal attached to the cryopanel. Pumping speed for a cryopanel is led from the statistical mechanics. An operating procedure based upon a typical cryopump system is also described.

Details

  • Original title: [In Japanese. / En japonais.]
  • Record ID : 1994-2685
  • Languages: Japanese
  • Source: Cryogenics/ Cryog. Eng. - vol. 28 - n. 6
  • Publication date: 1993
  • Document available for consultation in the library of the IIR headquarters only.

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