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Standard Reference Materials. The certification of 100 mm diameter silicon resistivity SRMs 2541 through 2547 using dual-configuration four-point probe measurements.

Author(s) : NIST, EHRSTEIN J. R., CROARKIN M. C.

Type of monograph: Other

Summary

The NIST Special Publication 260 Series is dedicated to the dissemination of information on different phases of the preparation, measurement, certification, and use of NIST SRMs. This report documents the selection of material, the certification procedure and its control, and the analysis of measurement uncertainty for a family of new and improved SRMs for sheet resistance and resistivity of silicon wafers, SRMs 2541 through 2547, covering the resistivity range 0.01 through 200 ohms/cm. These SRMs, made from 100 mm silicon, replace previous SRM sets 1521 through 1523, which used 50.8 mm diameter silicon at the same nominal resistivity levels.

Details

  • Original title: Standard Reference Materials. The certification of 100 mm diameter silicon resistivity SRMs 2541 through 2547 using dual-configuration four-point probe measurements.
  • Record ID : 1998-3270
  • Languages: English
  • Subject: Regulation
  • Publication: US Department of Commerce, NIST (National Institute of Standards and Technology) - United states/United states
  • Publication date: 1997/08
  • Collection:
  • Source: Source: NIST SP 260-131; 98 p. (21.5 x 28); fig.; tabl.; append.
  • Document available for consultation in the library of the IIR headquarters only.

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