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Broadband four-channel cryogenic wafer probing system for automated coplanar on-chip measurements.

Author(s) : HOFER G. J., JAGER F., KRATZ H. A.

Type of article: Article

Summary

The system has been designed for up to four simultaneous broadband on-chip measurements in the temperature range from 4 to 300 K. Special requirements for superconducting samples have been taken into consideration. Most of the measurements needed for characterization of superconducting thin films and circuits can be done with a high degree of precision in the low- and high-frequency region. Details of the design are presented and the system performance is discussed.

Details

  • Original title: Broadband four-channel cryogenic wafer probing system for automated coplanar on-chip measurements.
  • Record ID : 1994-2067
  • Languages: English
  • Source: Rev. sci. Instrum. - vol. 64 - n. 3
  • Publication date: 1993/03
  • Document available for consultation in the library of the IIR headquarters only.

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