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BUILDINGS FOR MICROELECTRONIC MANUFACTURING WITH VERY HIGH UTILITIES INTEGRATION.

[In German. / En allemand.]

Author(s) : GRÄBER H. G.

Type of article: Article

Summary

THE ARTICLE FOCUSES ON PROJECTS WITHIN SIEMENS AG FOR THE DEVELOPMENT AND PRODUCTION OF THE 1-, 4-AND 16 MEGA CHIPS, WITH PARTICULAR EMPHASIS ON RELATEDENGINEERING SOLUTIONS, AND PROVIDES COMPARISONS WITH SIMILAR JAPANESE AND AMERICAN HIGH-TECH PROJECTS. FUTURE INDUSTRY TRENDS WILL ALSO BE ADDRESSED.

Details

  • Original title: [In German. / En allemand.]
  • Record ID : 1991-1322
  • Languages: German
  • Source: Klima Kälte Heiz. - vol. 18 - n. 6
  • Publication date: 1990
  • Document available for consultation in the library of the IIR headquarters only.

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