ShareMicroelectronics: highly-advanced technologies.
Microélectronique : des technologies très poussées.
Author(s) : FOURRET M.
Type of article: Article
Summary
Microelectronics is the field in which environmentally controlled rooms (clean rooms) must meet the most severe requirements to achieve a high air quality: filtration, strict temperature and moisture control, precise air inlets and outlets.
Details
- Original title: Microélectronique : des technologies très poussées.
- Record ID : 2004-0388
- Languages: French
- Source: CLIM Prat. - n. 55
- Publication date: 2003/05
- Document available for consultation in the library of the IIR headquarters only.
Links
See other articles in this issue (4)
See the source
Indexing
- Themes: Air conditioning in laboratories and industry
- Keywords: Electronics; Design; Clean room; Air conditioning
-
TURN-KEY CLEAN ROOMS FOR HIGH-TECH ELECTRONICS....
- Author(s) : BRINGMANN A., GASSER F.
- Date : 1989
- Languages : French
- Source: Rev. tech. Sulzer - Sulzer tech. Rev. - vol. 71 - n. 4
View record
-
Mini-environments and the clean room.
- Author(s) : WHYTE W.
- Date : 1993/09
- Languages : English
- Source: Prof. Eng. - vol. 6 - n. 8
View record
-
PLANTS FOR SEMICONDUCTOR TECHNOLOGY. SAFETY, MA...
- Author(s) : GUICCIARDI F.
- Date : 1990/03
- Languages : Italian
- Source: Cond. Aria - vol. 34 - n. 3
View record
-
BUILDINGS FOR MICROELECTRONIC MANUFACTURING WIT...
- Author(s) : GRÄBER H. G.
- Date : 1990
- Languages : German
- Source: Klima Kälte Heiz. - vol. 18 - n. 6
View record
-
The present and future of clean rooms.
- Author(s) : SUZUKI M.
- Date : 1994/08
- Languages : Japanese
- Source: Refrigeration - vol. 69 - n. 802
View record