ShareMicroelectronics: highly-advanced technologies.
Microélectronique : des technologies très poussées.
Author(s) : FOURRET M.
Type of article: Article
Summary
Microelectronics is the field in which environmentally controlled rooms (clean rooms) must meet the most severe requirements to achieve a high air quality: filtration, strict temperature and moisture control, precise air inlets and outlets.
Details
- Original title: Microélectronique : des technologies très poussées.
- Record ID : 2004-0388
- Languages: French
- Source: CLIM Prat. - n. 55
- Publication date: 2003/05
- Document available for consultation in the library of the IIR headquarters only.
Links
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Indexing
- Themes: Air conditioning in laboratories and industry
- Keywords: Electronics; Design; Clean room; Air conditioning
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TURN-KEY CLEAN ROOMS FOR HIGH-TECH ELECTRONICS....
- Author(s) : BRINGMANN A., GASSER F.
- Date : 1989
- Languages : French
- Source: Rev. tech. Sulzer - Sulzer tech. Rev. - vol. 71 - n. 4
View record
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Mini-environments and the clean room.
- Author(s) : WHYTE W.
- Date : 1993/09
- Languages : English
- Source: Prof. Eng. - vol. 6 - n. 8
View record
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CLEAN ROOMS: A USER'S VIEW.
- Author(s) : LAMBERT R. D.
- Date : 1986/01/29
- Languages : English
View record
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MODULAR CLEAN ROOMS IN THE ELECTRONICS INDUSTRY.
- Author(s) : LARSSON B., NEIKTER K., STRINDEHAG O.
- Date : 1989/08
- Languages : English
- Source: H&V Eng. - vol. 62 - n. 696
View record
-
The present and future of clean rooms.
- Author(s) : SUZUKI M.
- Date : 1994/08
- Languages : Japanese
- Source: Refrigeration - vol. 69 - n. 802
View record