Share

PLANTS FOR SEMICONDUCTOR TECHNOLOGY. SAFETY, MANAGEMENT AND MAINTENANCE PROBLEMS.

[In Italian. / En italien.]

Author(s) : GUICCIARDI F.

Type of article: Article

Summary

CONSIDERING A FACTORY MANUFACTURING INTEGRATED CIRCUITS, THE ARTICLE DESCRIBES THE PECULIAR WORKING CONDITIONS IN A CLEAN ROOM, AND EXAMINES THE SOLUTIONS ADOPTED IN PLANTS, IN ORDER TO ENSURE THE PERSONNEL SAFETY AND TO REACH A HIGH-QUALITY LEVEL OF THE PRODUCT. A BRIEF DESCRIPTION IS GIVEN, OF THE SYSTEMS FOR CONTROLLING AND NEUTRALIZING WASTE WATER AND GASEOUS EMISSIONS. AS A CONCLUSION, THE MANAGEMENT AND MAINTENANCE OF PLANTS ARE MENTIONED.

Details

  • Original title: [In Italian. / En italien.]
  • Record ID : 1991-0362
  • Languages: Italian
  • Source: Cond. Aria - vol. 34 - n. 3
  • Publication date: 1990/03
  • Document available for consultation in the library of the IIR headquarters only.

Links


See other articles in this issue (2)
See the source

Indexing