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Clean-room technology: surface cleanliness.

Reinraumtechnik: Oberflächenreinheit./ Clean-room technology: surface cleanliness.

Author(s) : VDI

Type of monograph: Other

Summary

This guideline is intended as an aid for the planning, generation, maintenance, restoration and evaluation of the required cleanliness on surfaces in clean rooms. Therefore, it includes: requirements on the cleanliness and suitability of surfaces; procedures for the cleaning and decontamination of surfaces; test methods for the evaluation of the surface cleanliness.

Details

  • Original title: Reinraumtechnik: Oberflächenreinheit./ Clean-room technology: surface cleanliness.
  • Record ID : 1999-2002
  • Languages: German
  • Subject: Regulation
  • Publication: Verein deutscher ingenieure - Germany/Germany
  • Publication date: 1996/02
  • Collection:
  • Source: Source: VDI 2083 Bl. 4; 51 p. (21 x 29.7); fig.; tabl.; append.; DEM 130.00./ICS 13.100.
  • Document available for consultation in the library of the IIR headquarters only.

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