Clean-room technology: fundamentals, definitions, specification of cleanliness classes.

Reinraumtechnik: Grundlagen, Definitionen und Festlegungen der Reinheitsklassen./ Clean-room technology: fundamentals, definitions, specification of cleanliness classes.

Author(s) : VDI

Type of monograph: Booklet

Summary

This guideline specifies permissible airborne particulate concentrations at a clean work place based on air cleanliness classes. For the purpose of specification and/or contractual agreements, air cleanliness classes may be applied in order to evaluate the "state of rest" and the "state of operation" of clean rooms.

Details

  • Original title: Reinraumtechnik: Grundlagen, Definitionen und Festlegungen der Reinheitsklassen./ Clean-room technology: fundamentals, definitions, specification of cleanliness classes.
  • Record ID : 1999-2001
  • Languages: German
  • Subject: Regulation, General information
  • Publication: Verein Deutscher Ingenieure - Germany/Germany
  • Publication date: 1995/04
  • Collection:
  • Source: Source: VDI 2083 Bl. 1; 9 p. (21 x 29.7); fig.; tabl.; DEM 50.20./ICS 13.040.30
  • Document available for consultation in the library of the IIR headquarters only.