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DEVICE FOR THE MEASUREMENT IN REAL TIME OF THE THICKNESS OF PULVERIZED FILMS OPERATING BETWEEN 88 AND 673 K.

DISPOSITIF DE MESURE, EN TEMPS REEL, DE L'EPAISSEUR DE COUCHES MINCES PULVERISEES FONCTIONNANT DE 88 A 673 K.

Author(s) : PROTIN L., FLEURY G.

Type of article: Article

Summary

A VIBRATING QUARTZ MICROBALANCE ADJUSTED TO THE DEPOSITION OF AMORPHOUS METAL ALLOYS ON A COLD SUBSTRATE (88 K) IS DESCRIBED THE PRINCIPLE IS USING A MEASURING HEAD MADE UP OF TWO IDENTICAL QUARTZ ELEMENTS PLACED UNDER THE SAME THERMAL CONDITIONS AS THE SUBSTRATES RECEIVING DEPOSITS. A SEQUENTIAL MEASUREMENT OF THE OSCILLATION TIMES OF MEASURING AND REFERENCE QUARTZ ELEMENTS AND THEIR MEMORIZATION BY A MICROPROCESSOR MAKES IT POSSIBLE TO CALCULATE THE FILM THICKNESS WHILE PREVENTING PARASITIC THERMAL EFFECTS.

Details

  • Original title: DISPOSITIF DE MESURE, EN TEMPS REEL, DE L'EPAISSEUR DE COUCHES MINCES PULVERISEES FONCTIONNANT DE 88 A 673 K.
  • Record ID : 1987-0756
  • Languages: French
  • Source: Vide Couches minces - vol. 41 - n. 233
  • Publication date: 1986
  • Document available for consultation in the library of the IIR headquarters only.

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