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Energy efficiency for semiconductor manufacturing facilities.

Author(s) : COHEN R. M.

Type of article: Article

Summary

Only a life-cycle/net present cost model can effectively evaluate and implement cost savings strategies where there is a time lag between expenditure and full benefit. A number of examples are provided, notably total building heat recovery and high pressure atomizing humidification that both reduce energy consumption and have positive net present cost savings. Several other examples are cited that increase energy consumption modestly but offer significant first cost savings. The innovation is in finding opportunities with significant first cost gains vc. small operating energy penalties.

Details

  • Original title: Energy efficiency for semiconductor manufacturing facilities.
  • Record ID : 2004-1318
  • Languages: English
  • Source: ASHRAE Journal - vol. 45 - n. 8
  • Publication date: 2003/08

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