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Humidification of large-scale clean rooms by adiabatic humidification method in subtropical areas: an industrial case study.

Author(s) : CHEN J., HU S. C., CHIEN L. H., et al.

Summary

This study investigates the performance of adiabatic humidification in a large-scale clean room with various humidification methods. Theoretical analysis and experimental results show that adiabatic humidification is feasible. The relative humidity (RH) distribution in the clean room was within plus or minus 1% and the time variation of RH was within plus or minus 1% also, even when humidity of make-up air varies drastically. The authors found that adiabatic humidification with spray nozzles using "high pressure water atomization" method is favourable than the "two-fluids humidification" method. The effect on energy saving of adiabatic humidification and operational/initial cost of various humidification methods are also discussed.

Details

  • Original title: Humidification of large-scale clean rooms by adiabatic humidification method in subtropical areas: an industrial case study.
  • Record ID : 2010-0123
  • Languages: English
  • Source: 2009 ASHRAE Annual Conference CD. Transactions papers presented at the 2009 ASHRAE Annual Conference: Louisville, KY, June 2009. Volume 115, part 2.
  • Publication date: 2009/06/21

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