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HVAC FOR HIGH-TECH PRODUCTS.

Author(s) : MESZAROS I. R., NISHIMURA M.

Type of article: Article

Summary

SOPHISTICATED SYSTEMS WHICH MAINTAIN TEMPERATURE, HUMIDITY AND ULTRA CLEAN AIR ARE NEEDED FOR THE MANUFACTURE OF TODAY'S SEMICONDUCTORS. TYPICAL SYSTEMS FOR CLASS 10, CLASS 100 AND CLASS 10,000 ROOMS, AS DEFINED BY FEDERAL STANDARD N 209 B, ARE DESCRIBED AND SHOWN IN THE DIAGRAMS. A WORKED EXAMPLE SHOWS HOW TO CALCULATE THE PRIMARY AIR QUANTITY FOR A CLASS 10,000 ROOM. THE PRIMARY AIR IS PREFILTERED WITH 70% DOP (DIOCTYLPHTALATE) EFFICIENCY PREFILTERS AND SUPPLIED THROUGH FINAL HEPA (HIGH EFFICIENCY PARTICULATE AIR) FILTERS OF 99.97% DOP EFFICIENCY. E.W.S.

Details

  • Original title: HVAC FOR HIGH-TECH PRODUCTS.
  • Record ID : 1987-0690
  • Languages: English
  • Source: ASHRAE Journal - vol. 28 - n. 8
  • Publication date: 1986/08
  • Document available for consultation in the library of the IIR headquarters only.

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