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Piezo-resistive pressure sensor applicable for in situ pressure measurement at cryogenic temperatures under magnetic fields.

Author(s) : NARA K., OKAJI M., KATO H.

Type of article: Article

Summary

The temperature dependence of the pressure sensitivity of the sensor, its stability after thermal cycling and its performance under magnetic fields of up to 8 T are studied to assess its applicability. Its pressure sensitivity changes by not more than 5% from room temperatures down to 6 K. Its characteristics are also found to stabilize after several thermal cycles between room temperature and liquid nitrogen temperature. The effect of the magnetic field on pressure sensitivity does not exceed 2% under a magnetic field of up to 8 T between 6 and 40 K.

Details

  • Original title: Piezo-resistive pressure sensor applicable for in situ pressure measurement at cryogenic temperatures under magnetic fields.
  • Record ID : 1994-0016
  • Languages: English
  • Source: Cryogenics - vol. 33 - n. 5
  • Publication date: 1993/05

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