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RECEPTOR MODELLING FOR CONTAMINANT PARTICLE SOURCE APPORTIONMENT IN CLEAN ROOMS.

Author(s) : YI T.

Type of article: Article

Summary

RECEPTOR MODELLING IS USED TO APPORTION THE CONTAMINANT PARTICLE CONCENTRATIONS AMONG THEIR SOURCES IN CLEAN ROOMS THROUGH PARTICLE NUMBER CONCENTRATION BALANCES AT VARIOUS SIZE INTERVALS. QUANTITATIVE CONTRIBUTIONS OF 2 PARTICULATE SOURCES TO THE AEROSOL CONCENTRATION NEAR WAFER FABRICATING UNITS WERE DETERMINED IN BOTH CLEAN ROOMS. GOOD AGREEMENT WAS OBTAINED BETWEEN MEASURED AND PREDICTED SIZE DISTRIBUTIONS OF THE AEROSOL AT THE RECEPTOR SITES. (PASCAL, Bibliogr. int., ENERG., FR., N 4, 1991, 2913.

Details

  • Original title: RECEPTOR MODELLING FOR CONTAMINANT PARTICLE SOURCE APPORTIONMENT IN CLEAN ROOMS.
  • Record ID : 1992-0774
  • Languages: English
  • Source: Aerosol Sci. Technol. - vol. 12 - n. 4
  • Publication date: 1990
  • Document available for consultation in the library of the IIR headquarters only.

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