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The manufacture of traditional clean-room products including megachips.

[In German. / En allemand.]

Author(s) : HILBERS H.

Type of article: Article

Summary

Air pollution alone is not a major problem for clean-room production facilities. But vibration, particle generation and similar phenomena from the product or introduced from outside must be countered in the process of attaining the necessary cleanliness classification.

Details

  • Original title: [In German. / En allemand.]
  • Record ID : 1992-2977
  • Languages: German
  • Subject: Environment
  • Source: Klima Kälte Heiz. - vol. 20 - n. 1-2
  • Publication date: 1992/01
  • Document available for consultation in the library of the IIR headquarters only.

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