Superconducting storage ring NIJI-III.
Author(s) : EMURA K., TSUTSUI Y., MIURA F., et al.
Type of article: Article
Summary
NIJI-III is a compact, superconducting storage ring dedicated for use in several commercial applications, especially X-ray lithography. Assembly of the ring has been completed and NIJI-III has been operating since August 1990. A beam current of above 450 milliampères was attained at an injection energy of 280 megaelectronvolts. Currents of more than 200 milliampères can be accumulated at the final energy of 600 megaelectronvolts.
Details
- Original title: Superconducting storage ring NIJI-III.
- Record ID : 1993-1230
- Languages: English
- Source: Rev. sci. Instrum. - vol. 63 - n. 1 (IIA)
- Publication date: 1992/01
- Document available for consultation in the library of the IIR headquarters only.
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Indexing
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Themes:
Large-scale cryogenic applications;
Superconduction - Keywords: Superconduction; Industrial application; X-ray
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Superconducting compact sources for lithography.
- Author(s) : WILSON M. N.
- Date : 1992/01
- Languages : English
- Source: Rev. sci. Instrum. - vol. 63 - n. 1 (IIA)
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- Date : 1992/09
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- Author(s) : TSUKAMOTO O., AKITA S.
- Date : 2002/06
- Languages : English
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