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Superconducting compact sources for lithography.

Author(s) : WILSON M. N.

Type of article: Article

Summary

The production of advanced microchips by X-ray lithography seems likely to become the first large-scale industrial application of synchrotron radiation. Of all the possible X-ray sources, only storage rings have sufficient power to achieve economic throughputs. For this reason, many rings have been and are being built worldwide for lithography. Superconducting rings are preferred because their higher magnetic fields make them more compact.

Details

  • Original title: Superconducting compact sources for lithography.
  • Record ID : 1993-1229
  • Languages: English
  • Source: Rev. sci. Instrum. - vol. 63 - n. 1 (IIA)
  • Publication date: 1992/01
  • Document available for consultation in the library of the IIR headquarters only.

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