TEMPERATURE AND HUMIDITY CONTROL FOR ELECTRONIC MANUFACTURING.
Author(s) : HAINES R. W.
Type of article: Article
Summary
TYPICALLY, A CLASS 10,000 CLEAN ROOM ENVIRONMENT IS NEEDED WITH A RELATIVE HUMIDITY OF 35 TO 40% AND A TEMPERATURE OF 294 TO 295 K (21 TO 22 DEG C) WITH CLOSE TOLERANCES. SUMMER, WINTER AND INTERMEDIATE CONDITIONS ARE DISCUSSED WITH THE AID OF PSYCHROMETRIC CHARTS. A SCHEMATIC SHOWS A TYPICAL AIR SUPPLY SYSTEM AND CONDENSING AND WATER REHEAT SYSTEM. OPERATION OF THE SYSTEM IS DESCRIBED. E.W.S.
Details
- Original title: TEMPERATURE AND HUMIDITY CONTROL FOR ELECTRONIC MANUFACTURING.
- Record ID : 1985-2127
- Languages: English
- Source: Heat. Pip. Air Cond. - vol. 56 - n. 11
- Publication date: 1984/11
- Document available for consultation in the library of the IIR headquarters only.
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Indexing
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Exact control of temperature and humidity.
- Author(s) : BEEK P. van
- Date : 1992/02
- Languages : Dutch
- Source: Koude & Luchtbehandeling - vol. 85 - n. 2
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DUST IN CLEAN ROOMS.
- Author(s) : ZHAO R. Y., QIAN P. N., XU W. Q.
- Date : 1989/08/01
- Languages : English
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Régulation pour salles blanches et installation...
- Author(s) : DAVY DE VIRVILLE P.
- Date : 1994/07
- Languages : French
- Source: Chaud Froid Plomb. - vol. 48 - n. 560
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Energy-efficiency strategies for clean rooms wi...
- Author(s) : TSCHUDI W., FAULKNER D., HEBERT A.
- Date : 2005
- Languages : English
- Source: ASHRAE Transactions. 2005 Annual Meeting, Denver, Colorado, USA. Volume 111, part 2 + CD-ROM.
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Ambientes especiales para la fabricación de pro...
- Date : 2004/01
- Languages : Spanish
- Source: ACR-Latinoam. - vol. 7 - n. 1
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