ShareVolatile contamination in clean rooms: a new challenge.
La contamination volatile, un nouveau challenge pour les salles propres.
Author(s) : TARDIF F.
Type of article: Article
Summary
Volatile contamination comprising gaseous substances can not be handled by clean-room filtration systems, and represents a new challenge for clean-room-equipment manufacturers who must provide means of air purification, detection and measurements. Recently developed techniques for manufacturing semiconductors can also be applied in other industrial fields.
Details
- Original title: La contamination volatile, un nouveau challenge pour les salles propres.
- Record ID : 2002-0476
- Languages: French
- Source: Chaud Froid Plomb. - n. 633
- Publication date: 2001/03
- Document available for consultation in the library of the IIR headquarters only.
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Indexing
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Volatile organic chemical pollutants in laborat...
- Author(s) : NICOARA S., CULEA M., PALIBRODA N., COZAR O.
- Date : 1994/03
- Languages : English
- Source: Indoor Environ. - vol. 3 - n. 2
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Ambientes controlados.
- Author(s) : BOTERO C. G.
- Date : 2000/05
- Languages : Spanish
- Source: Rev. ACAIRE - n. 24
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AIR QUALITY FOR AN IN VITRO LAB.
- Author(s) : DERAAD D.
- Date : 1990/09
- Languages : English
- Source: Heat. Pip. Air Cond. - vol. 62 - n. 9
View record
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Qualité de l'air et aérosols : détection et mét...
- Author(s) : RENOUX A.
- Date : 1994/05/18
- Languages : French
- Source: J. CCI - vol. 5 - n. 5
View record
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Measurement of fallen bacteria.
- Author(s) : SHIOIRI I.
- Date : 1996
- Languages : Japanese
- Source: Refrigeration - vol. 71 - n. 827
View record