ShareVolatile contamination in clean rooms: a new challenge.
La contamination volatile, un nouveau challenge pour les salles propres.
Author(s) : TARDIF F.
Type of article: Article
Summary
Volatile contamination comprising gaseous substances can not be handled by clean-room filtration systems, and represents a new challenge for clean-room-equipment manufacturers who must provide means of air purification, detection and measurements. Recently developed techniques for manufacturing semiconductors can also be applied in other industrial fields.
Details
- Original title: La contamination volatile, un nouveau challenge pour les salles propres.
- Record ID : 2002-0476
- Languages: French
- Source: Chaud Froid Plomb. - n. 633
- Publication date: 2001/03
- Document available for consultation in the library of the IIR headquarters only.
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- Date : 1994/03
- Languages : English
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- Source: 2022 Purdue Conferences. 7th International High Performance Buildings Conference at Purdue.
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- Source: Salles propres - n. 61
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Measurement of fallen bacteria.
- Author(s) : SHIOIRI I.
- Date : 1996
- Languages : Japanese
- Source: Refrigeration - vol. 71 - n. 827
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Ambient air. Controlling contamination.
- Author(s) : CARMINATI D.
- Date : 1994
- Languages : Italian
- Source: Ind. Latte - vol. 19 - n. 10
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