ShareVOLTAGE CONTRAST AT 6 K IN A SCANNING ELECTRON MICROSCOPE.
Author(s) : SADORF H.
Type of article: Article
Summary
AN ARRANGEMENT FOR VOLTAGE CONTRAST MEASUREMENTS IN A SCANNING ELECTRON MICROSCOPE OF INTEGRATED CIRCUITS AND DEVICES AT ANY LOW TEMPERATURES HAS BEEN CONCEIVED AND TESTED. THE ARRANGEMENT COMPRISES A LOW TEMPERATURE SPECIMEN STAGE AND AN INTEGRATED COMBINATION OF SECONDARY ELECTRON ANALYSER AND LOCAL CRYOPUMP. MILLIVOLT SIGNALS OF SWITCHING JOSEPHSON JUNCTIONS HAVE BEEN MEASURED WITH THE ELECTRON PROBE. DETRIMENTAL EFFECTS OF CONDENSATION OR ELECTRON BEAM CONTAMINATION AT 6 K HAVE BEEN PRACTICALLY ELIMINATED.
Details
- Original title: VOLTAGE CONTRAST AT 6 K IN A SCANNING ELECTRON MICROSCOPE.
- Record ID : 1988-2204
- Languages: English
- Source: Cryogenics - vol. 27 - n. 11
- Publication date: 1987
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