Share

A continuously working monitoring system for clean room ionisers.

Author(s) : SEBALD T.

Type of article: Article

Summary

Notes that in recent years knowledge of the effects of electrostatic charges on product quality and the yield in microstructure manufacturing under clean room conditions has increased. Static control measures are taken in manufacturing areas, including the use of clean room-compatible air ionisers. Notes the characteristics of these ionisers. Describes and illustrates schematically a continuously-working monitoring system used in static control.

Details

  • Original title: A continuously working monitoring system for clean room ionisers.
  • Record ID : 1993-3545
  • Languages: English
  • Publication date: 1992/12
  • Source: Source: Environ. Eng.
    vol. 5; n. 4; 16-19; 10 fig.; 13 ref.

Indexing