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Air-tightness measuring method for clean rooms: part 8 of a series on research practice of the national standard task group for the Code for clean room construction and acceptance testing.

[In Chinese. / En chinois.]

Author(s) : CAO G., XU Z., ZHANG Y.

Type of article: Article

Summary

This article analyses the importance of air-tightness validation of clean rooms to prevent contamination diffusion. It presents the detailed test method and gives some relevant advice for assessing air-tightness of cleanrooms on the basis of theoretical calculation and experimental study. The results show that the half-life time of a very air-tight clean room is less than 5 minutes, and the hourly leakage rate is less than 10%.

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Pages: 1-6

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Details

  • Original title: [In Chinese. / En chinois.]
  • Record ID : 2009-0781
  • Languages: Chinese
  • Source: HV & AC - vol. 38 - n. 217
  • Publication date: 2008/11

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