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Outside of the process tools themselves, the chilled water plant is typically the single largest consumer of electrical energy in a semiconductor facility. This load includes chillers, cooling tower fans, primary pumps, secondary pumps and condenser pumps. To meet the cooling requirements for any particular heat load, many combinations of this equipment can be run. However, electricity consumption varies considerably depending on the combination of equipment used and the operating levels of the individual components.
Details
- Original title: Chiller plant optimization tool.
- Record ID : 2008-2605
- Languages: English
- Source: ASHRAE Journal - vol. 50 - n. 7
- Publication date: 2008/07
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- Date : 1996
- Languages : Czech
- Source: Vytápení Vetrání Instalace - vol. 5 - n. 3
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- Date : 2009
- Languages : Czech
- Source: Vytápení Vetrání Instalace - vol. 18 - n. 2
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- Date : 1994/03/15
- Languages : French
- Source: J. CCI - vol. 5 - n. 3
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Energy survey of a workshop building.
- Author(s) : TALIB K. M.
- Date : 1992
- Languages : Hungarian
- Source: Magy. Epülgép. - vol. 41 - n. 2
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EFFECTIVE MINE COOLING IS CRUCIAL.
- Author(s) : SHEER T. J.
- Date : 1984/07
- Languages : English
- Source: Heat. Aircond. Refrig. - vol. 16 - n. 4
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