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Clean room energy efficiency.

Author(s) : MATHEW P. A., TSCHUDI W., SARTOR D., et al.

Type of article: Article, Review

Summary

Clean rooms are energy-intensive because of cleanliness requirements that result in high airflow rates and system static pressures, and process requirements that result in high cooling loads. Studies have shown that a wide range of clean-room energy efficiencies exist, and facility managers may not be aware of how energy efficient their clean-room facility can be, relative to other clean-room facilities with the same cleanliness requirements. Metrics and benchmarks are an effective way to compare one facility to another and to track the performance of a given facility over time.

Details

  • Original title: Clean room energy efficiency.
  • Record ID : 2010-1618
  • Languages: English
  • Source: ASHRAE Journal - vol. 52 - n. 10
  • Publication date: 2010/10

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